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This work demonstrates a capacitive RF (radio frequency) MEMS (micro-electromechanical systems) switch, which is actuated by electro-thermal force and electrostatic force at the same time, and than latching the switching status by electrostatic force only. Since thermal actuator need relative low voltage compare to electrostatic actuator, for electrostatic force need almost no power to maintain the...
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application,...
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