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A review of the on-going research in Turkey, -in Middle East Technical University (METU)-, on tunable microwave components and reconfigurable antennas produced by RF MEMS technology is presented in this paper. As a key element of reconfigurable structures, several capacitive contact shunt RF MEMS switches are designed, fabricated and measured. Lifetime measurements show that these switches can operate...
This paper presents analysis on parameters required for the fabrication process of RF MEMS switches. Stress analysis on gold thin film and variation of stress with different deposition conditions has been studied. Adhesion issues which occurred during the fabrication have also been high lighted. While fabricating the RF MEMS switch the suspended cantilever beam or membrane can touch the lower actuation...
A novel fabrication process for a fixed-fixed membrane structure in RF microelectromechanical-systems switches is implemented to alter the stress-distribution and deformation of the membrane and thus vary the required actuation force. This two-step process removes UV-light-exposed photoresist first by wet dissolution of a sacrificial photoresist layer and then by oxygen reactive ion etching. During...
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