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The numerical modeling of a microelectromechanical System (MEMS) switch consisting of a suspended gold membrane on a coplanar waveguide (CPW) is presented. In this work, the effect of length, width, and thickness of micro-cantilever beam on deflection, natural frequency and quality factor at different operational temperatures are numerically modeled. Further fabrication process flow is presented....
This paper presents an optimized design of Radio Frequency (RF) Micro-Electro-Mechanical System (MEMS) capacitive switch. The optimized design of proposed switch include utilization of three fabrication steps of lithography which helps in effectively reducing the cost of fabrication and the mechanical modeling of switch has Nano-scaled dimensions which again is beneficial in obtaining scaled device...
The RF MEMS Switch is the key element in the field of microwave and mm-wave signal control. In recent years it has been investigated widely because of its advantages of low insertion loss, low power consumption, high isolation, excellent compatibility with silicon and high linearity over PIN diode or FET counterpart. Meanwhile as the development of laser technology it has demonstrated extensively...
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