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Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 538 - 547
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 163 - 173
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 538 - 547
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 163 - 173