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Journal of Microelectromechanical Systems > 2009 > 18 > 5 > 990 - 997
Journal of Microelectromechanical Systems > 2009 > 18 > 2 > 458 - 465
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 163 - 173
Journal of Microelectromechanical Systems > 2009 > 18 > 5 > 990 - 997
Journal of Microelectromechanical Systems > 2009 > 18 > 2 > 458 - 465
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 163 - 173