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This paper presents analysis on parameters required for the fabrication process of RF MEMS switches. Stress analysis on gold thin film and variation of stress with different deposition conditions has been studied. Adhesion issues which occurred during the fabrication have also been high lighted. While fabricating the RF MEMS switch the suspended cantilever beam or membrane can touch the lower actuation...
The paper presents a novel cantilever beam RF MEMS metal to metal contact series switch. The proposed cantilever design is supported with three supporting bars at the rear end of the beam. These bars not only make the smooth mechanical movement of the beam but also result in a low spring constant. The beam has a spring constant of 3.37 N/m. The switch has actuation voltage as low as 19 V. To control...
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