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This paper describes a contactless RF MEMS switch, composed of two surface-micromachined tunable capacitors and two bonded-wire inductors, which can achieve a power isolation ratio of 10 dB with a capacitance variation of mere 4:1 over a narrow bandwidth near 2.4 GHz. This novel approach of using inductors eases the deflection requirement for the deformable bridge for the variable capacitor, and allows...
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