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This paper reports ultra-wide tuned RF micro-electro mechanical systems (MEMS) tunable capacitor using netted membrane structure for highly miniaturized and reconfigurable RF devices and systems applications. The proposed capacitor is also designed to achieve high linearity and capacitance values for commercial applications. Since the netted membrane is stuck to the dielectric layer of the bottom...
This letter documents the design and characterization of integrated and continuously tuned, radio frequency multilayer metal noncontact varactors with low-power, large-displacement, thin-film lead zirconate titanate (PZT) actuators. The devices, with capacitances in the 0.019–0.23-pF range, achieved high quality factors at the maximum capacitance state (\(Q = 100\) at 8.7 GHz) and tuning ratios...
This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally...
This paper reports on 1-chip RF-MEMS tunable capacitor that equips CMOS driver circuit in the underlying layer. A Wafer Level Chip Scale Package (WLCSP) optimized for RF-MEMS is employed to minimize the module size. The MEMS actuation voltage is generated by an Actuation Voltage Generator (AVG). The boost mechanism employed in the AVG enables instant high voltage generation and reduction of the dielectric...
In the last years MEMS Switches and related MEM components have encountered a great interest in the technology community for their outstanding intrinsic characteristics. MEMS Switches in particular offer low insertion loss, higher isolation, almost zero power consumption, small size and weight at very low intermodulation distortion, which makes them suitable for many applications. The MEMS technology...
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