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This paper presents two newly developed models of capacitive silicon bulk acoustic resonators (SiBARs) characterized by a rectangular-bar geometry. The first model is derived from an approximate analytical solution of the linear elastodynamic equations for a parallelepiped made of an orthotropic material. This solution, which is recognized to represent a Lamb wave propagating across the width of the...
We present a biasing technique and a novel oscillator architecture for the elimination of frequency drifts in resonant electrostatic MEMS that are caused by the motion of charge present within dielectrics. We demonstrate more than two orders of magnitude improvement in stability for a test device operating as a frequency reference at 1.077 MHz, reducing frequency drift from more than 100 Hz over 3...
In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence...
We develop an efficient characterization method for temperature compensated micromechanical resonators by employing empirical data analysis with an a priori model. We have previously demonstrated that electrostatic-tuning of a composite resonator with an accurate lookup table can achieve a temperature stability of ??3.2 ppm, but this characterization method was not suitable for commercialization since...
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