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Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 243 - 249
Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 827 - 839
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 243 - 249
Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 827 - 839