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We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The new gyroscope utilizes completely symmetric, dynamically balanced quadruple mass architecture, which provides a unique combination of maximized quality (Q) factors and isotropy of both the resonant frequency and the damping. The vacuum sealed SOI prototype with a 2 kHz operational frequency demonstrated...
We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester...
In this paper, we report for the first time the detailed analysis of the nonlinear behavior of a Lame-mode SOI bulk resonator. The measured resonant frequency of the resonator was 6.35 MHz with a quality factor of 1.7 million in the ambient pressure of 0.02 Pa. We used the two-step semi-analytic approach to characterize the model parameters of the resonator and the nonlinear model of the resonator...
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