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Although the structural, mechanical and optical properties of amorphous Ge2Sb2Te5 films are very important for many practical applications, how to control and improve these properties has not yet been well explored. Here, we find that ion bombardment and nitrogen incorporation exert significant impacts on the structure, hardness and Urbach tail width (E0) of amorphous Ge2Sb2Te5 films. The underlying...
The paper reports on the structure, mechanical and optical properties of sputtered Zr–Al–O films. The Zr–Al–O films with Zr/Al>1 and Zr/Al<1 were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate (∅=50mm) fixed to the magnetron cathode by a Zr fixing ring with inner diameter ∅ in . The content of Al in the...
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