The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
An in situ study of self-forming barriers from a Cu–Mn alloy was performed to investigate the barrier growth using X-ray diffraction on damascene lines. The associated evolution in interconnect texture and Cu stress was also observed. The shift in Cu diffraction peak position was used to determine the change in Mn concentration and hence, estimate the thickness of the MnSi x O y barrier...
TiAlCr(N) coatings were reactively magnetron-sputtered from a Ti-51Al-12Cr alloy target in this study by changing the nitrogen partial pressure over the range of 0-25% of the total pressure. The influence of nitrogen addition on the microstructure and stress development in the TiAlCr(N) films was investigated. With the increase of nitrogen partial pressure, the film microstructure undergoes a transition...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.