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Platinum and palladium dithio/diselenoimidodiphosphinato complexes have been synthesized and used as single source precursors for the deposition of platinum and palladium chalcogenide thin films by the Low Pressure Chemical Vapour Deposition technique. Pure PtSe 2 thin films were deposited at varying temperatures from the [Pt{N(SeP i Pr 2 ) 2 } 2 ] complex....
This paper reports on a unique crystallization phenomenon of amorphous plasma-enhanced chemical vapour deposited SiN x thin films induced by heating to temperatures ⩾1148K in air. The crystallization occurs as randomly scattered pits, within which clusters of smaller crystals form. The crystals formed are free of oxygen and are identified to be α-Si 3 N 4 . The crystallization...
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