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ZnO thin films were prepared in Ar and Ar+H 2 atmospheres by rf magnetron sputtering, and then they were annealed in vacuum and Ar+H 2 atmosphere, respectively. The structure and optical–electrical properties of the films were investigated by X-ray diffraction, transmittance spectra, and resistivity measurement, and their dependences on deposition atmosphere, annealing treatment, and...
The annealing effect on the optical properties of ZnO epilayers was reported. The ZnO thin films were grown using metal organic chemical vapor deposition method, and annealed in atmosphere at 850 °C for different time periods. Double-crystal X-ray diffraction showed that, after annealing, the density of the edge-dislocations decreased dramatically upon annealing, however, the screw-dislocations were...
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