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A zero-level packaged, digitally switched, RF MEMS capacitor array has been developed within a mass production capable HV RF CMOS process. These RF MEMS capacitors are grouped in flip-chip cells that exhibit a high quality factor of 87 at 2 GHz, a tuning ratio of almost 10 to 1, a self resonant frequency greater than 5 GHz, and operate using a 3.3 V supply voltage. These arrays are ideally suited...
MEMS-based oscillators have recently become a topic of interest as integrated alternatives are sought for quartz-based frequency references. When seeking a programmable solution, a key component of such systems is a low power, low area fractional-N synthesizer, which also provides a convenient path for compensating changes in the MEMS resonant frequency with temperature and process. We present several...
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