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Materials Science in Semiconductor Processing > 2012 > 15 > 3 > 227-231
Microelectronic Engineering > 2011 > 88 > 10 > 3168-3171
Materials Science in Semiconductor Processing > 2012 > 15 > 3 > 227-231
Microelectronic Engineering > 2011 > 88 > 10 > 3168-3171