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A set of diagnostic chips for process control and design parameters evaluation has been developed for HYPRES' 1.0 kA/cm2, 4.5 kA/cm2, and 20 kA/cm2 fabrication processes, consisting of four 5times5-mm chips. Testing was performed on automated test setup (OCTOPUX) that automatically logs results and maintains records of fabrication process and design parameters. The design of diagnostic structures...
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