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In this paper, an inductively coupled pulsed plasma source with an operating frequency of 29 kHz is described. Using a series resonance circuit with a load capacitance of 12 muF and large diameter (approximately 20 cm) induction coils surrounding a spherical discharge vessel, a discharge plasma was produced and investigated in a pressure range of 0.1 to 100 Pa. Pulsed coil currents reached a maximum...
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