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This paper describes the novel single- and triaxis piezoelectric-bimorph accelerometers that are built on parylene beams with ZnO films. The unamplified sensitivity and the minimum detectable signal of the fabricated single-axis accelerometer are measured to be 7.0 mV/g and 0.01 g, respectively, over a frequency range from 60 Hz to subhertz. The linearity of the sensitivity as a function of acceleration...
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