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It has been proved that polysilicon film will fatigue under high cycle mechanical loads. However, there are still debates on its fatigue mechanism. In this paper, a different configuration is applied to the fatigue test to discover more phenomena. The test structure is a surface-micromachined microcantilever that vibrates out of plane under electrostatic excitation at its resonant frequency. A U-shaped...
An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ??m) is suspended by a 20 ??m thick annular silicon membrane (radius = 1800 ??m). A 24 ??m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction...
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