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An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ??m) is suspended by a 20 ??m thick annular silicon membrane (radius = 1800 ??m). A 24 ??m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction...
We have newly made a specific biomolecule microsensor measuring leakage current and impedance with minute liposome solution that interacts with biomolecules such as protein. The microsensor was fabricated with a Si surface-bulk-micromachining process. K4[Fe(CN)6] solution was entrapped inside of liposome of 1,2-dipalmitoyl-sn-glycero-3-phosphocholline (DPPC) and Carbonic Anhydrase from Bovine (CAB)...
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