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Thin ZrO 2 /Ta 2 O 5 multi-laminate films were grown by atomic layer deposition and the relation between their dielectric and chemical properties was investigated. Metallic Ta is strongly reduced at the interface between ZrO 2 and Ta 2 O 5 , probably during the deposition of the ZrO 2 /Ta 2 O 5 laminated films. The tetragonal...
Lanthanum hexaboride (LaB6) doped MgO film was fabricated by the magnetron sputtering method as a new protective layer for alternating current plasma display panel (AC PDP). Surface morphology, optical properties and discharge characteristics were discussed by varying LaB6 doping concentration. It was demonstrated that this film was effective in decreasing the firing voltage of AC PDP. Especially...
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