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X-ray photoelectron spectroscopy (XPS) was used to study the surface chemical composition of the anode deposits in a miniature magnetron ion pump. The pump was mounted on an UHV system with the ultimate pressure of 1×10 −9 mbar. A stable discharge was established in the nitrogen atmosphere with some traces of CO at about 10 −7 mbar. The cathode was made of pure titanium. The sputtered...
Titanium and tantalum monocarbides have been evaporated by means of doubled Nd-YAG laser and deposited on oriented silicon substrates. The gaseous phase and the deposited films have been characterised by mass spectrometry, optical imaging (ICCD camera) and electron microscopy analysis (SEM, TEM), X-ray diffraction, X-ray photoelectron spectroscopy (XPS), respectively. The major differences between...
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