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Multi‐stage co‐evaporation processes for the growth of Cu2ZnSnSe4 (CZTSe) thin films are investigated with time‐resolved in situ angle‐dispersive X‐ray diffraction (in situ XRD). Different preparation protocols were applied and controlled by in situ laser light scattering (in situ LLS). The composition of the deposited layers was adjusted by making use of a stoichiometric transitions in the LLS signal...
The deposition of a Cu2ZnSnSe4 (CZTSe) thin film with a multi‐stage co‐evaporation process is investigated with time‐resolved in situ X‐ray diffraction (in situ XRD). For the experiment a novel setup intended for in situ analysis of thin film deposition processes was used. The in situ data confirm the former observation that CZTSe growth is delayed with deposition of only Cu2−xSe and ZnSe in the initial...
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