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Monolithic integration of DC-DC converters with on-chip inductors has emerged as a viable means to reduce size and increase transient performance for portable electronics applications. High-power-density inductors have been recognized as a barrier for such integration. In this paper, a CMOS-compatible process that is capable of fabricating on-chip inductors with low DC resistance and high power density...
Potential core materials to supersede ferrite in the 0.5-10 MHz frequency range are investigated. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Although the present inductor, at 500 KHz, achieves 77% power efficiency for 24.7 W/cm3 power density,...
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