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Deep-silicon etching was applied to an inductor in a 0.25 μm SiGe:C BiCMOS process. Significant increase of quality factor was achieved. Different simulations of the inductor were done with a planar EM simulator. The way how to handle non-homogenous dielectrics in a planar EM simulator is shown. A good agreement between measurement and simulation can be seen. The effect of back side etching is well...
Deep-silicon etching was applied to an inductor in a 0.25 μm SiGe:C BiCMOS process. Significant increase of quality factor was achieved. Different simulations of the inductor were done with a planar EM simulator. The way how to handle non-homogenous dielectrics in a planar EM simulator is shown. A good agreement between measurement and simulation can be seen. The effect of back side etching is well...
An on-chip buck converter with 3D chip stacking is proposed and the operation is experimentally verified. The manufactured converter achieves a maximum power efficiency of 62% for an output current of 70mA with a switching frequency of 200MHz and a 2x2mm on-chip LC output filter in 0.35mum CMOS. The use of glass epoxy interposer to increase the maximum power efficiency up to 71.3%, and the power efficiency...
We performed analyses of the frequency response of cloth inductors and thin-film inductors using an amorphous core, applying both to miniature dc-dc converters. Because these inductors are used in high-frequency bands from 1 to 100 MHz, the frequency dependence of the inductance L, capacitance C and resistance R in the inductors cannot be disregarded. The undetermined coefficients in a least-squares...
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