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Pulsed laser deposition (PLD) is used in this work to produce zirconia thin films. Targets are sintered zirconia ceramic pellets which are fully or partially stabilized with either 3 mol% Y 2 O 3 , 20 mol% MgO or 9 mol% CaO. Depending on the stabilizing oxide, their structure is either tetragonal or cubic in the presence of an eventual monoclinic secondary phase. The targets are laser...
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