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The implementation of the dual-mass MEMS vibratory gyroscope in device-level vacuum packing was presented. The electrostatic actuation and capacitive sensing methods were adopted in electrical design of gyroscope. The self-resonance drive circuit with automatic gain control was employed in the drive closed-loop, and the open loop detect circuit was used. In order to reduce environment impact on the...
We report a new family of ultra high- silicon microelectromechanical systems (MEMS) tuning fork gyroscopes demonstrating angular rate and, for the first time, rate integrating (whole angle) operation. The novel mechanical architecture maximizes the -factor and minimizes frequency and damping mismatches. We demonstrated the vacuum packaged SOI dual and quadruple mass gyroscopes with...
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