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In order to solve the vibration during the process of transferring wafers and achieve the purpose of transferring wafers accurately and stably, the wafer transfer robot dynamic model was modelled and the strategy of vibration suppression based on input shaping was proposed. Based on the characteristics of wafer transfer robot, ZV input shaper and skewed shaper was designed to solve the single axis's...
During the processing of wafer, in order to avoid the friction between wafer and wafer box, and to guarantee the clean state of the working environment simultaneously, small contour error and little vibration are required for wafer transfer robot to deliver wafer, i.e., to achieve stable and accurate trajectory for wafer delivery. To lessen contour error, suppress vibration, a kind of control algorithm...
In this paper, we develop an asymmetric s-curve profile method with jerk bounded to obtain high-precision motion and reduce the residual vibration. All possible instances for asymmetric s-curve profile planning are analyzed. The algorithm and its implementation are proposed with a direct and complete method. Simulation results are presented to verify the effectiveness and reliability of the proposed...
A nonlinear reference shaping method for manipulators which are operated in living environments is proposed. It generates an intermediate reference position, and it is combined with a control based on the virtual spring-damper hypothesis proposed by Arimoto et al. The initial acceleration is moderated by an intermediate reference position inserted between the original target and the current position...
This paper presents investigations into the development of control schemes for end-point vibration suppression and input trajectory of a flexible manipulator. A constrained planar single-link flexible manipulator is considered and the dynamic model of the system is derived using the assumed mode method. To study the effectiveness of the controllers, initially a Linear Quadratic Regulator (LQR) is...
This paper presents a comparative assessment of control schemes for vibration suppression and end-point trajectory tracking of a flexible robot manipulator. A constrained planar single-link flexible robot manipulator is considered and the dynamic model of the system is derived using the assumed mode method. To study the effectiveness of the controllers, initially a collocated PD controller is developed...
Precision positioning machines are required to run with higher speed and higher accuracy. The high running speed can cause strong excitations on the machine structure, which results in severe structure vibration and long settling time. This paper presents a low-vibration motion profile generation method to reduce the residual vibration. The acceleration profile is designed by using a level-shifted...
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