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This study examines the effects of sputter deposition growth conditions on IrO2 thin films developed as electrode layers for Pb(ZrxTi1-x)O3 piezoelectric Micro-Electro-Mechanical Systems applications. For IrO2 thin-film bottom electrodes sputter deposited on {100}-textured, rutile structure, TiO2 template layers, the effects of substrate temperature, Ar and O2 flow rates, and post-deposition anneal...
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