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This paper presents a microelectromechanical systems contact switch having both hard and soft contact materials in a single cantilever-type switching device. It operates with a zipping mechanism within which both contact materials (Pt-to-Pt and Au-to-Au) make individual contact sequentially and then detach in a reverse sequence to take advantage of both contact materials: low contact resistance and...
This paper reports on the reliability issues encountered during the development of a dry ohmic switch fabricated in MEMS technology. Particularly, focus is made on electrical contact reliability. Contact degradation during hot switching tests has been noticed, and leads to switch lifetime limitation. In order to understand this phenomenon, characterizations have been performed on damaged switches...
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