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Yield is a very important criterion to measure the semiconductor wafer fabrication facilities (FABs) productivity. The finished products will be check by Wafer Acceptance Test (WAT) and Circuit Probe (CP) to classified into ferior goods or inferior goods. This research applied the data from WAT and CP for the selection of the most important measuring parameters to improve the yield. Three methods,...
Support vector regression (SVR) is one of the new methods of soft sensor modeling for estimating the products of metabolism in microorganism fermentations. The accuracy of SVR is mainly impacted by two factors: input variables selection and parameters set in SVR training procedures. But it is difficult to select the input variables and set the parameters. A novel method of soft sensor modeling is...
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