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In summary, we dem onstrated AlGaN/GaN enhancement-mode MIS-HEMTs that exhibited a high maximum drain current of 860 mA/mm and high off-state breakdown voltage of 320 V with threshold voltage of 3 V by introducing a piezoelectric-induced cap and a recessed ALD-MIS-gate structure. This is the highest Lja??with the breakdown voltage of over 300 V for enhancement -mode HEMTs. The 1 mm gate width device...
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