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Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 115 - 123
IEEE Translation Journal on Magnetics in Japan > 1991 > 6 > 5 > 408 - 414
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 115 - 123
IEEE Translation Journal on Magnetics in Japan > 1991 > 6 > 5 > 408 - 414