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PZT (65/35) films were prepared using a diol route with 10 mol% excess Pb and deposited on Pt/Ti/SiO 2 /Si substrates. Samples were characterised using XRD and cross-sectional TEM/STEM in combination with EDX and EELS. Linescan and point analyses were used to investigate the interdiffusion of elements over nanometre length scales during film heat treatments. During annealing at ca. 500 ...
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