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The initial stages of chemical vapor deposition of ZrO 2 from zirconium tetra-tert-butoxide (ZTB) on Si(100)-(2×1) have been studied by scanning tunnelling microscopy (STM) and synchrotron radiation excited photoelectron spectroscopy (PES). The STM images and core level (PES) spectra indicate that the predominant surface modifications induced by ZTB are due to silicon carbonization and formation...
The growth of ultrathin ZrO 2 films on Si(100)-(2×1) and Si(111)-(7×7) has been studied with core level photoelectron spectroscopy and X-ray absorption spectroscopy. The films were deposited sequentially by chemical vapor deposition in ultra-high vacuum using zirconium tetra-tert-butoxide as precursor. Deposition of a>50Å thick film leads in both cases to tetragonal ZrO 2 (t-ZrO...
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