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In this investigation Ti–B–N-coatings were prepared on high speed steel and silicon substrates by reactive magnetron sputtering from a TiB 2 target with a stepwise increase of the nitrogen flow rate. Some samples were vacuum-annealed up to 600°C.All Ti–B–N layers had a dense structureless morphology, whereas the pure TiB 2 coating was crystalline and had a strong [001] fibre texture...
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