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This paper presents the preparation of piezoelectric lead zirconium titanate (PZT) thick films and the fabrication of PZT surface acoustic waves (SAW) devices with sub-micron IDT electrodes by the micro-powder-sol-gel method. The utilization of these PZT SAW devices as biosensors to detect human IgG is also reported. From the experimental results, it was found that PZT thick films prepared from the...
This paper presents the design, fabrication and characterization of a novel flexural plate wave (FPW) microsensor for immunoglobulin-E (IgE) detecting applications. The propagation membrane is constructed with SiO2/Si3N4/ZnO multilayers and be released from the silicon substrate as a floating thin-plate by using bulk micromachining technology. The ultrasonic flexural plate waves are launched and received...
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