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Plasma torches are widely used for deposition processes. Optimum burner design and operation conditions help to save large amount of energy and environmental pollution. This can be considerably supported by modeling. A coupled 3D MHD-simulation of an inductively coupled plasma torch and the deposition process of SiO2 on a moving target has been performed. The steady-state continuity, momentum and...
The deposition of platinum atoms by argon plasma sputtering has been simulated by using a 3-D Monte Carlo simulation called Sputtered Particles Transport in Gas, which provides spatial and energy distributions of the Pt atoms impinging on the substrate and on the chamber walls. The Yamamura formula provides the Pt sputtering yield from argon ions, whereas the initial energy distribution of sputtered...
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