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This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for 〈100〉 oriented beam for two etching solutions: 25 wt. % TMAH and 30 wt. % KOH water solutions at 80 oC are given.
In this paper, a novel microelectrode array (MEA), with varying arrowhead shapes, is fabricated and evaluated for retinal prostheses. The proposed MEA has a total of 199 arrowhead-shaped microelectrodes, with heights ranging from 42 to 123.5 μm. This height variation allows each microelectrode to contact the spherical eyeball conformably and to approach the stimulation target retinal cells very closely...
Advances in micromachining technology can facilitate the integration of SAW (Surface Acoustic Wave) devices and CMOS circuitry on IC scale substrate for Monolithic fabrication. The optimal design and performance of these filters can be reached by using new Smart materials. The key component in the structure of the SAW device is the piezoelectric materials used which depends mainly on some important...
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