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IEEE Sensors Journal > 2008 > 8 > 7 > 1236 - 1242
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 3 > 399 - 412
IEEE Sensors Journal > 2008 > 8 > 7 > 1236 - 1242
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 3 > 399 - 412