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Plasma-exposed Si surface related to Si recess in source/drain region was investigated in detail for various superposed bias configurations with frequencies of 13.56 MHz and 400 kHz. Two different bias powers were utilized by an inductively coupled plasma reactor (ICP). The surface layer (SL) and the interfacial layer between the SL and Si substrate (IL) were analyzed by spectroscopic ellipsometry...
A low-cost high-resolution wavelength-division-multiplexing (WDM) interrogation system operating around 800 nm region with operational bandwidth up to 60 nm and resolution of 12.7 pm utilizing a tilted fiber Bragg grating (TFBG) and a CCD-array detector has been implemented. The system has been evaluated for interrogating fiber Bragg grating based strain, temperature sensors, giving sensitivities...
A long period grating (LPG) coated with polyvinyl alcohol has been developed and evaluated through exposure to a range of relative humidity (RH) levels (from 33%RH to 97%RH). The conditions for the creation of the sensor probes are described and the response of the device in terms of changes in the resonance loss of several of the spectral loss bands has been monitored. In order to make comparative...
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