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Due to its immunity to ambient conditions, the eddy-current position sensor is considered a good candidate for use in high-precision applications. Currently, the eddy-current sensor is not often used in such applications, due to its poor resolution as compared to, for example, the capacitive position sensor. A novel eddy-current sensor is proposed that uses small standoff distances in combination...
Electrical modeling of through silicon via (TSV) is very important for three dimensional (3D) system design and analysis. In this paper, we present our study on the impact of sidewall roughness on the TSV electrical performance in the ultra-broad band range. Our analysis shows that the root mean square height of the rough sidewall is comparable to the skin depth in extremely high frequency (> 20G...
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