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Langmuir probes operating in the electron saturation current mode were used to fix a time of sheath approaching a probe position. Probe current was traced just before and after current zero followed by escalation of the transient recovery voltage in a gap with copper electrodes. Probe measurements were accompanied with tracing of post-arc currents. Basic plasma parameters such as the electron temperature...
Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack (HfAlOx/SiO2) were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional SiO2. For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer...
A 150 GHz interferometer system has been developed, and is being used, to gain new insights into many aspects of fluorescent lamps discharges. This presentation describes results of the application of the interferometer to studies of the negative glow plasma, especially with regard to plasma-electrode coupling. In a related presentation, details are provided of the interferometer's setup, function,...
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