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IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 531 - 540
IEEE Sensors Journal > 2008 > 8 > 8 > 1404 - 1410
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 531 - 540
IEEE Sensors Journal > 2008 > 8 > 8 > 1404 - 1410