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The sol-gel method and the magnetron sputtering method were used to deposit the SnO2 thin films on 128° YX LiNbO3 piezoelectric substrate for fabricating different kinds of delay-line surface acoustic wave (SAW) hydrogen gas sensors. To improve hydrogen gas sensing performance of SnO2 sensing films, the bi-layer structure sensitive films was used, which was composed of one pure SnO2 layer and one...
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