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We investigated structural and magnetic properties of CoMnSi (CMS) Heusler alloy films and giant magneto-resistance (GMR) ratio of current-perpendicular-to-plane (CPP) GMR sensor elements. The films were deposited with magnetron sputtering method and annealed at 673 K and 773 K. The CMS films were identified as B2 structure by using X-ray diffraction and the magnetization of the films were evaluated...
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