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Ultra high aspect ratio microelectrodes are designed and fabricated to record and stimulate neural signals from deeper areas of the brain and nerves and also to provide a new research tool to the neuroscience community. We present a fabrication process to build ultra high aspect ratio silicon based microelectrode arrays for the neural applications. The mu-wire electrical discharge machining (mu-WEDM)...
Smoothly polished single-crystal silicon plates were cut by wire electrical discharge machining (WEDM) in water and in oil in order to investigate the effect of WEDM on the polished surfaces. For cutting in water, polished surfaces near cut sections have chips and cracks, and are extremely rough; the rough regions are upheaved. Examinations suggest that the upheaved region is silicon dioxide and results...
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