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Journal of Microelectromechanical Systems > 2010 > 19 > 6 > 1390 - 1399
Journal of Microelectromechanical Systems > 2009 > 18 > 4 > 878 - 883
Journal of Microelectromechanical Systems > 2010 > 19 > 6 > 1390 - 1399
Journal of Microelectromechanical Systems > 2009 > 18 > 4 > 878 - 883